Designing and analyzing of a piezoelectric energy harvester with tunable system natural frequency for WSN and biosensing applications

A new structure for PEH with actuation piezoelectric layer for shifting natural frequency of the system is proposed. Beams are consisted to be Si and AlN piezoelectric which is deposited on fixed–fixed beams that produces high stress points and generates more power in comparison to the other cantile...

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Bibliographic Details
Published in:Microsystem technologies : sensors, actuators, systems integration actuators, systems integration, 2019-06, Vol.25 (6), p.2493-2500
Main Authors: Damya, Amin, Abbaspour Sani, Ebrahim, Rezazadeh, Ghader
Format: Article
Language:English
Subjects:
Electronics and Microelectronics
Engineering
Instrumentation
Mechanical Engineering
Nanotechnology
Technical Paper
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Summary:A new structure for PEH with actuation piezoelectric layer for shifting natural frequency of the system is proposed. Beams are consisted to be Si and AlN piezoelectric which is deposited on fixed–fixed beams that produces high stress points and generates more power in comparison to the other cantilever beam PEHs. This PEH with ability of shifting system natural frequency is designed to the size of 0.25 cm 2 using optimum available space. Actuation piezoelectric layers added on both sides of the beams provides possibility of continues reducing systems natural frequency to less than 10 Hz. Accomplished simulation also confirms theoretical calculation done by PDE method to estimate natural frequency of the system. The natural frequency of the system without actuation voltage is 58 Hz that with 1 g acceleration generated 4.27 V and 71 µW electrical power which can be used in WSN and biosensing applications.
ISSN:0946-7076
1432-1858
DOI:10.1007/s00542-018-4150-5