Analytical model of squeeze film air damping of perforated plates in the free molecular regime

In this paper, an analytical model of squeeze film damping (SQFD) of perforated plates in the free molecular regime is developed, which is based on: (1) the modification of the perforated energy transfer model (P-ETM) (Li and Hu, J Micromech Microeng 21:025006, 2011 ) by giving the probability of mo...

Full description

Saved in:
Bibliographic Details
Published in:Microsystem technologies : sensors, actuators, systems integration actuators, systems integration, 2019-05, Vol.25 (5), p.1753-1761
Main Authors: Lu, Cunhao, Li, Pu, Fang, Yuming
Format: Article
Language:English
Subjects:
Electronics and Microelectronics
Engineering
Instrumentation
Mechanical Engineering
Nanotechnology
Technical Paper
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:In this paper, an analytical model of squeeze film damping (SQFD) of perforated plates in the free molecular regime is developed, which is based on: (1) the modification of the perforated energy transfer model (P-ETM) (Li and Hu, J Micromech Microeng 21:025006, 2011 ) by giving the probability of molecules entering the gap through holes; (2) the application of Sumali’s formula (J Micromech Microeng 17:2231–2240, 2007 ) to relate to the Monte Carlo model (MC) (Hutcherson and Ye, J Micromech Microeng 14:1726–1733, 2004 ) quantitatively. The analytical model can model the perforation effect on SQFD of plates of various hole sizes. Compared with experiment data and numerical models, the analytical model is proved to be accurate, easy to operate. The effect of gap distance on SQFD of perforated plate in the free molecular regime is discussed. Due to perforation effect, as gap distance increases, the damping constant of non-perforated plate decreases faster than that of perforated plate of the same size.
ISSN:0946-7076
1432-1858
DOI:10.1007/s00542-019-04421-3