The micro-electro-mechanical systems (MEMS) gas sensor with bilayer SnO2/WO3 films for ammonia detection

A double layered SnO 2 /WO 3 sensing film was prepared on a P-type silicon wafer and the sensing characteristics of SnO 2 film and SnO 2 /WO 3 double layered film have been investigated. The micro films were characterized by X-ray diffraction, scanning electron microscope (SEM), line mapping microgr...

Full description

Saved in:
Bibliographic Details
Published in:Microsystem technologies : sensors, actuators, systems integration actuators, systems integration, 2022-01, Vol.28 (1), p.287-293
Main Authors: Liao, Yu-Hsuan, Hsiao, Yu-Jen, Nagarjuna, Yempati, Shieh, Jiann-Shing
Format: Article
Language:English
Subjects:
Electronics and Microelectronics
Engineering
Instrumentation
Mechanical Engineering
Nanotechnology
Technical Paper
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:A double layered SnO 2 /WO 3 sensing film was prepared on a P-type silicon wafer and the sensing characteristics of SnO 2 film and SnO 2 /WO 3 double layered film have been investigated. The micro films were characterized by X-ray diffraction, scanning electron microscope (SEM), line mapping micrograph from SEM, the response and recovery time of SnO 2 film and SnO 2 /WO 3 film. Different concentrations of NH 3 from 50 to 300 ppb were taken into considerations. Whereas SnO 2 /WO 3 bilayer film shows 25% at 50 ppb and gradually increases to 52% at 300 ppb which is double the response to the single layer SnO 2 film. With the increase in the NH 3 concentration of NH 3 , the response and recovery time was improved with SnO 2 /WO 3 layered film.
ISSN:0946-7076
1432-1858
DOI:10.1007/s00542-019-04732-5