Motion nonlinearity of gimbaled MEMS micromirror in omnidirectional scanning

Saved in:
Bibliographic Details
Published in:Microsystem technologies : sensors, actuators, systems integration actuators, systems integration, 2024-08
Main Authors: Suzuki, Katsuya, Sasaki, Takashi, Hane, Kazuhiro
Format: Article
Language:English
Citations: Items that this one cites
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:
ISSN:0946-7076
1432-1858
DOI:10.1007/s00542-024-05749-1