Investigation of glass panels thickness profile by all-fiber digital heterodyne interferometry

All-fiber digital heterodyne interferometry is a laser metrology technique employing pseudo-random codes phase modulated onto an optical carrier signal. In this heterodyne interferometer system, the optical signal includes signal reflected and transmitted from the sample, respectively. Compared with...

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Bibliographic Details
Published in:Optical review (Tokyo, Japan) Japan), 2010-11, Vol.17 (6), p.549-552
Main Authors: Gao, Long, Wang, Chunhui, Ji, Yiqin, Li, Yanchao, Cong, Haifang, Qu, Yang
Format: Article
Language:English
Subjects:
Atomic
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Interferometers
Lasers
Microwaves
Molecular
Optical and Plasma Physics
Optical Devices
Optical instruments, equipment and techniques
Optics
Photonics
Physics
Physics and Astronomy
Quantum Optics
Regular Papers
RF and Optical Engineering
Citations: Items that this one cites
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Description
Summary:All-fiber digital heterodyne interferometry is a laser metrology technique employing pseudo-random codes phase modulated onto an optical carrier signal. In this heterodyne interferometer system, the optical signal includes signal reflected and transmitted from the sample, respectively. Compared with the conventional heterodyne interferometry, this enhanced optical system has much higher measurement sensitivity, and can distinguish the signal which reflected from the front and the rear surface of the sample. Analysis and simulation for the digital heterodyne interferometry are presented. It takes approximately 4 s to scan the whole surface with the diameter of 300 mm. The thickness profile of the sample is obtained in the experiment. The discussion about the experiment is given finally.
ISSN:1340-6000
1349-9432
DOI:10.1007/s10043-010-0098-0