The development of a portable line-shaping optical system for silicon surface treatment

This study proposes a beam shaper for converting a circle beam profile generated with a Gaussian intensity distribution by an 808 nm diode laser into a line beam profile for silicon surface treatment applications. To produce a hand-held and low-cost device with a large spot-size laser, this study us...

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Bibliographic Details
Published in:Optical review (Tokyo, Japan) Japan), 2013-03, Vol.20 (2), p.163-166
Main Authors: Tseng, Shih-Feng, Hsiao, Wen-Tse, Chang, Han-Chao, Chen, Ming-Fei
Format: Article
Language:English
Subjects:
Atomic
Lasers
Microwaves
Molecular
Optical and Plasma Physics
Optical Devices
Optics
Photonics
Physics
Physics and Astronomy
Quantum Optics
Regular Paper
RF and Optical Engineering
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Summary:This study proposes a beam shaper for converting a circle beam profile generated with a Gaussian intensity distribution by an 808 nm diode laser into a line beam profile for silicon surface treatment applications. To produce a hand-held and low-cost device with a large spot-size laser, this study uses a portable optical system consisting of a diode laser source, a collimator, a cylindrical lens, and a plano-convex lens to generate an approximately 40 × 3:5mm 2 line beam profile at a working distance of 200 mm. The silicon surface treated by the line-shaped laser beam has significantly reduced reflectance spectra. The proposed system is also suitable for the surface cleaning of materials.
ISSN:1340-6000
1349-9432
DOI:10.1007/s10043-013-0026-1