Tunable, low loss Ba0.6Sr0.4TiO3/Bi1.5Mg1.0Nb1.5O7/Ba0.6Sr0.4TiO3 multilayer thin films prepared by pulsed laser deposition

• Published in: Journal of materials science. Materials in electronics 2016-08, Vol.27 (8), p.7947-7952
• Main Authors: Ma, Baogang, Yu, Shihui, Chen, Shengtian, Zhang, Jieling, Huang, Xiushi, Liu, Qing, Zhang, Weifeng
• Format: Article
• Language: English
• Subjects: Characterization and Evaluation of Materials; Chemistry and Materials Science; Materials Science; Optical and Electronic Materials
• ISSN: 0957-4522; 1573-482X
• DOI: 10.1007/s10854-016-4787-8

Ba 0.6 Sr 0.4 TiO 3 /Bi 1.5 Mg 1.0 Nb 1.5 O 7 /Ba 0.6 Sr 0.4 TiO 3 (BST/BMN/BST) multilayer thin films and Ba 0.6 Sr 0.4 TiO 3 (BST) thin films were fabricated on Pt/Ti/SiO 2 /Si (1 0 0) substrates by pulsed laser deposition. The multilayer thin films show a dielectric constant of 314 and dielectric loss tangent of 0.006 at frequency of 0.1 MHz. The BST/BMN/BST multilayer thin films had a ~26.7 % relative tunability of dielectric constant at a maximum applied dc bias field of 357 kV/cm, while the figure of merit is 45.5. No obvious hysteresis behavior was observed in the BST/BMN/BST multilayer thin films. The excellent dielectric constant and tunability, low dielectric loss tangent suggest that BST/BMN/BST multilayer thin films have giant potential application for tunable microwave device.