Preparation and characterization of highly transparent and conductive indium-zinc oxide thin films deposited by pyrolysis spray technique

• Published in: Optical and quantum electronics 2016-06, Vol.48 (6), Article 339
• Main Authors: Dounia, R., Migalska-Zalas, A., Addou, M., Bernede, J. C., Outzourhit, A., Benbrahim, M.
• Format: Article
• Language: English
• Subjects: Advanced Materials for Photonics and Electronics; Characterization and Evaluation of Materials; Computer Communication Networks; Electrical Engineering; Lasers; Optical Devices; Optics; Photonics; Physics; Physics and Astronomy
• ISSN: 0306-8919; 1572-817X
• DOI: 10.1007/s11082-016-0596-9

Ternary compound films of ZnO–In 2 O 3 system were prepared by spray pyrolysis method. The films were deposited on heated glass substrates by pyrolytic decomposition of zinc chloride and indium chloride in distilled water with different ratio x of [Zn] to [Zn + In] (x = [Zn]/[Zn + In]). The phase change, chemical composition, electrical and optical properties of the Zn–In oxides were investigated over wide range of ratio x. Quasi-amorphous sub-oxide films with thickness of 200–400 nm were first obtained, the films were then annealed in Argon atmosphere at 550 °C for 1 h. To optimize the physical properties of sprayed ZnO–In 2 O 3 thin films, we carry out on a systematic study of their microstructural characterization and transport properties. Continuous structural variation from In 2 O 3 to ZnO through Zn 2 In 2 O 5 and Zn 3 In 2 O 6 was observed on the deposited films with increasing the ratio x. Maximum of conductivity of 1.47 × 10 3  Ω −1  cm −1 was reached for x = 0.5 (at.%). We also concluded that the transport properties of the films are greatly governed by their microstructure.