Fabrication Process Comparison and Dynamics Evaluation of Electrothermal Actuators for a Prototype MEMS Safe and Arming Devices

Electrothermal actuators fabricated using the Polysilicon Multi-User MEMS Process (PolyMUMPs) and the Sandia Ultra-Planar, Multi-Level MEMS Technology 5 (SUMMiT V) have been investigated for use in integrated microelectromechanical systems (MEMS) safe and arming devices. The fabricated electrotherma...

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Bibliographic Details
Published in:Experimental mechanics 2012-10, Vol.52 (8), p.1229-1238
Main Authors: Ostrow, S. A., Lake, R. A., Lombardi, J. P., Coutu, R. A., Starman, L. A.
Format: Article
Language:English
Subjects:
Biomedical Engineering and Bioengineering
Characterization and Evaluation of Materials
Control
Dynamical Systems
Engineering
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Lasers
Mechanical instruments, equipment and techniques
Micromechanical devices and systems
Optical Devices
Optics
Photonics
Physics
Solid Mechanics
Vibration
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Summary:Electrothermal actuators fabricated using the Polysilicon Multi-User MEMS Process (PolyMUMPs) and the Sandia Ultra-Planar, Multi-Level MEMS Technology 5 (SUMMiT V) have been investigated for use in integrated microelectromechanical systems (MEMS) safe and arming devices. The fabricated electrothermal actuators have been dynamically tested to determine and compare the responses of devices from both processes. Furthermore, the integration of these devices into a safe and arming device were tested and investigated for each process. Initial results indicate that the SUMMiT devices provide the most optimum results based on consistency of operation and reliability.
ISSN:0014-4851
1741-2765
DOI:10.1007/s11340-011-9579-8