Study of Electrical, Mechanical, and Tribological Properties of CrN x Thin Films as a Function of Sputtering Conditions

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Bibliographic Details
Published in:Journal of materials engineering and performance 2014-10, Vol.23 (10), p.3444-3448
Main Authors: Khojier, K., Savaloni, H., Zolghadr, S., Amani, E.
Format: Article
Language:English
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ISSN:1059-9495
1544-1024
DOI:10.1007/s11665-014-1148-8