Investigation on Target Erosion and Effect of Deposition Rate on Microstructure and Properties of Sputtered Be Coating

The beryllium coatings were prepared by direct current magnetron sputtering at different powers. The target erosion rate was theoretically predicted on the basis of the conservation of electric charge and mass. The experiment based on weighing method was performed, which verified the theoretical pre...

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Bibliographic Details
Published in:Journal of materials engineering and performance 2018-08, Vol.27 (8), p.4043-4049
Main Authors: Luo, Bingchi, Zhang, Jiqiang, Li, Wenqi, Li, Kai, Wang, Xuemin, Wu, Weidong
Format: Article
Language:English
Subjects:
Characterization and Evaluation of Materials
Chemistry and Materials Science
Corrosion and Coatings
Engineering Design
Materials Science
Quality Control
Reliability
Safety and Risk
Tribology
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Summary:The beryllium coatings were prepared by direct current magnetron sputtering at different powers. The target erosion rate was theoretically predicted on the basis of the conservation of electric charge and mass. The experiment based on weighing method was performed, which verified the theoretical prediction. XRD analysis reveals that the sputter coatings mainly consist of α-Be phase. On increasing deposition rates, the surface morphology shows a transition from a regular equiaxed grain to a cauliflower-like polygrain owing to the irregular arrangement of atoms and bulk diffusion enhancement originating from the sputtering thermal effect. A heterogeneous particulate-induced growth was observed and derived from fallen scrap during the sputtering process. The surface roughness displays a power function with the thickness increment, while the electrical resistivity is reversed with the grain size.
ISSN:1059-9495
1544-1024
DOI:10.1007/s11665-018-3465-9