Analysis and design of resistance-wire heater in MOCVD reactor

Metal organic chemical vapor deposition (MOCVD) is a key equipment in the manufacturing of semiconductor optoelectronic devices and microwave devices in industry. Heating system is a vital part of MOCVD. Specific heating device and thermal control technology are needed for each new reactor design. B...

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Bibliographic Details
Published in:Journal of Central South University 2014-09, Vol.21 (9), p.3518-3524
Main Authors: Qu, Yu-xuan, Wang, Bin, Hu, Shi-gang, Wu, Xiao-feng, Li, Zhi-ming, Tang, Zhi-jun, Li, Jin, Hu, Ying-lu
Format: Article
Language:English
Subjects:
Engineering
Metallic Materials
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Summary:Metal organic chemical vapor deposition (MOCVD) is a key equipment in the manufacturing of semiconductor optoelectronic devices and microwave devices in industry. Heating system is a vital part of MOCVD. Specific heating device and thermal control technology are needed for each new reactor design. By using resistance-wire heating MOCVD reaction chamber model, thermal analysis and structure optimization of the reactor were developed from the vertical position and the distance between coils of the resistance-wire heater. It is indicated that, within a certain range, the average temperature of the graphite susceptor varies linearly with the vertical distance of heater to susceptor, and with the changed distances between the coils; furthermore, single resistance-wire heater should be placed loosely in the internal and tightly in the external. The modulate accuracy of the temperature field approximately equals the change of the average temperature corresponding to the change of the coil position.
ISSN:2095-2899
2227-5223
DOI:10.1007/s11771-014-2331-7