Effect of substrate temperature on aligned high-density carbon nanotubes deposited by RF-PECVD

The high-density carbon nanotubes (CNTs) are synthesized on Fe/Si substrate in the mixture of acetylene and hydrogen gas by radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) method. The effects of substrate temperature on the growth of CNTs are studied by scanning electron microsc...

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Bibliographic Details
Published in:Optoelectronics letters 2011-03, Vol.7 (2), p.85-87
Main Authors: Zhang, Kai-liang, Lin, Xin-yuan, Xu, Wang, Miao, Yin-ping, Hu, Kai, Zhang, Yong
Format: Article
Language:English
Subjects:
Lasers
Optical Devices
Optics
Photonics
Physics
Physics and Astronomy
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Summary:The high-density carbon nanotubes (CNTs) are synthesized on Fe/Si substrate in the mixture of acetylene and hydrogen gas by radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) method. The effects of substrate temperature on the growth of CNTs are studied by scanning electron microscopy (SEM), transmission electron microscopy (TEM) and Raman spectroscopy. The quality of CNTs is improved considerably by increasing the substrate temperature while the beam density is increased and graphitization degree ( I D / I G ) is enhanced. The best aligned CNTs are prepared at 750 °C, the beam D density is about 1.6 × 10 3 /μm 2 , and I D / I G is about 0.93. Temperature influence is also discussed.
ISSN:1673-1905
1993-5013
DOI:10.1007/s11801-011-0169-x