An ammonia gas sensor with two chambers based on U-bending microring resonator

A compact ammonia gas sensor with two gas chambers is proposed in this paper, whose core sensing device is a U-bending microring resonator. The waveguides of ring part and feedback part in this resonator are made of silicon on insulator （SOl） ridge waveguide covered with ZnO nanocrystals which are s...

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Bibliographic Details
Published in:Optoelectronics letters 2013-09, Vol.9 (5), p.333-336
Main Author: 张鑫 李志全 孙宇超 童凯
Format: Article
Language:English
Subjects:
Lasers
Optical Devices
Optics
Photonics
Physics
Physics and Astronomy
传感器
弯曲
微环
气体样品
氨气
瓦斯浓度
谐振器
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Summary:A compact ammonia gas sensor with two gas chambers is proposed in this paper, whose core sensing device is a U-bending microring resonator. The waveguides of ring part and feedback part in this resonator are made of silicon on insulator （SOl） ridge waveguide covered with ZnO nanocrystals which are sensitive to ammonia gas. The sensor can measure two groups of gas samples simultaneously. By computer simulation, we obtain the clear sensitivity curves of two gas chambers in ammonia sensor when the gas concentration increases from 0 to 4‰. The gas concentrations in two chambers can be obtained from one output spectrum, which significantly reduces the material and time consumption.
ISSN:1673-1905
1993-5013
DOI:10.1007/s11801-013-3068-5