Synthesis and characterization of nano silicon and titanium nitride powders using atmospheric microwave plasma technique

We have demonstrated a simple, scalable and inexpensive method based on microwave plasma for synthesizing 5 to 10 g/h of nanomaterials. Luminescent nano silicon particles were synthesized by homogenous nucleation of silicon vapour produced by the radial injection of silicon tetrachloride vapour and...

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Bibliographic Details
Published in:Journal of chemical sciences (Bangalore, India) India), 2012-05, Vol.124 (3), p.557-563
Main Authors: KUMAR, S MAHENDRA, MURUGAN, K, CHANDRASEKHAR, S B, HEBALKAR, NEHA, KRISHNA, M, SATYANARAYANA, B S, MADRAS, GIRIDHAR
Format: Article
Language:English
Subjects:
Chemistry
Chemistry and Materials Science
Chemistry/Food Science
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Summary:We have demonstrated a simple, scalable and inexpensive method based on microwave plasma for synthesizing 5 to 10 g/h of nanomaterials. Luminescent nano silicon particles were synthesized by homogenous nucleation of silicon vapour produced by the radial injection of silicon tetrachloride vapour and nano titanium nitride was synthesized by using liquid titanium tetrachloride as the precursor. The synthesized nano silicon and titanium nitride powders were characterized by XRD, XPS, TEM, SEM and BET. The characterization techniques indicated that the synthesized powders were indeed crystalline nanomaterials. Graphical Abstract A simple, scalable and inexpensive method based on microwave plasma was developed for synthesizing 5 to 10 g/h of silicon and titanium nitride nanopowders. Silicon was synthesized by homogenous nucleation of silicon vapour while titanium nitride was synthesized by using liquid titanium tetrachloride as the precursor.
ISSN:0974-3626
0973-7103
DOI:10.1007/s12039-012-0256-y