Measurement of optical mirror with a small-aperture interferometer

In this paper, the principle of subaperture stitching interferometry was introduced. A testing stage with five degrees of freedom for stitching interferometry was built. A model based on least-squares method and error averaging method for data processing was estab- lished, which could reduce error a...

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Published in:Frontiers of Optoelectronics (Online) 2012-06, Vol.5 (2), p.218-223
Main Authors: Gao, Ya, Tam, Hon Yuen, Wen, Yongfu, Zhang, Huijing, Cheng, Haobo
Format: Article
Language:English
Subjects:
Biomedical Engineering and Bioengineering
Electrical Engineering
Engineering
Physics
Research Article
五自由度
光学镜
子孔径拼接
小口径
干涉
数据处理方法
最小二乘法
测试阶段
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container_title Frontiers of Optoelectronics (Online)
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creator Gao, Ya
Tam, Hon Yuen
Wen, Yongfu
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Cheng, Haobo
description In this paper, the principle of subaperture stitching interferometry was introduced. A testing stage with five degrees of freedom for stitching interferometry was built. A model based on least-squares method and error averaging method for data processing was estab- lished, which could reduce error accumulation and improve the precision. A 100ram plane mirror was measured with a 50mm aperture interferometer by means of stitching interferometry. Compared with the results by a 100 mm interferometer, peak to valley （PV） and root mean square （RMS） of the phase distribution residual are 0.00382 and 0.00042, respectively. It proved that the model and method are helpful for large optical measurement.
doi_str_mv 10.1007/s12200-012-0233-6
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source Springer; Springer Nature - SpringerLink Journals - Fully Open Access
subjects Biomedical Engineering and Bioengineering
Electrical Engineering
Engineering
Physics
Research Article
五自由度
光学镜
子孔径拼接
小口径
干涉
数据处理方法
最小二乘法
测试阶段
title Measurement of optical mirror with a small-aperture interferometer
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