Some design parameters and corrective factors of nano-electromechanical devices

• Published in: Journal of micro-nano mechatronics 2011-06, Vol.6 (3-4), p.59-63
• Main Authors: Keyvani-Janbahan, Aliasghar, Sadeghi, Morteza H., Ghanbari, Mina, Rezazadeh, Ghader
• Format: Article
• Language: English
• Subjects: Electronics and Microelectronics; Engineering; Instrumentation; Machines; Manufacturing; Nanotechnology; Processes; Research Paper; Robotics and Automation
• ISSN: 1865-3928; 1865-3936
• DOI: 10.1007/s12213-011-0037-6

Design process of Nano-Electro-Mechanical devices demands solution of complicated nonlinear equations. Till now researchers were engaged with finding a proper way of solving, and examining the validity and precision of them. Due to nonlinearity of governing partial differential equations, there is no known simple analytic solution and numerical methods should be employed. On the other hand since in design process it is not only necessary to solve the governing non-linear equations via numerical methods, which are inherently iterative, but also it is necessary to change each of the engaged parameters repeatedly, rendering the solution very time consuming. In this article it is aimed to present a set of numerically assisted semi explicit solutions to alleviate the hardness of design process. In this study mechanical behavior of a simple nano structure (beam) under Casimir and vdW effects is considered, and a number of its essential characteristics are found precisely by extracting some corrective factors. Moreover, by introducing a number of non-dimensional charts to assist the designer as well as extending the results, and making the design process much easier.