Numerical Investigation of Reactive Species Generation in $$He/O_2$$ Admixture Capacitively Coupled Plasma

Saved in:
Bibliographic Details
Published in:Arabian journal for science and engineering (2011) 2021-06, Vol.46 (6), p.5847-5858
Main Authors: Kechidi, Ziane, Zitouni, Hannachi, Tahraoui, Abdelatif, Belbachir, Ahmed Hafid, Bendella, Soumia
Format: Article
Language:English
Citations: Items that this one cites
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:
ISSN:2193-567X
2191-4281
DOI:10.1007/s13369-020-04955-z