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A Tri-axial Resonating Beam MEMS Accelerometer
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Published in: | Journal of electrical engineering & technology 2024-07 |
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Main Authors: | , , |
Format: | Article |
Language: | English |
Citations: | Items that this one cites |
Online Access: | Get full text |
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Summary: | |
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ISSN: | 1975-0102 2093-7423 |
DOI: | 10.1007/s42835-024-01984-8 |