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A Tri-axial Resonating Beam MEMS Accelerometer

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Bibliographic Details
Published in:Journal of electrical engineering & technology 2024-07
Main Authors: Yadav, Chinmay, Srinivasulu Raju, S, Yenuganti, Sujan
Format: Article
Language:English
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Online Access:Get full text
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ISSN:1975-0102
2093-7423
DOI:10.1007/s42835-024-01984-8