Secondary-ion mass spectrometry (SIMS) of metal surfaces under oxygen. I. Group VIII elements

Secondary-ions (SI) generated by the bombardment of Fe, Co, Ni, Rh, Pd, Ir and Pt surfaces under oxygen with primary Ar + ions of energy 2 keV at a current density of 0.05 mA cm −2 have been analyzed using a double focusing (Varian 311 A) mass spectrometer. Metal cluster ions Me l + (with l up to 6)...

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Bibliographic Details
Published in:International journal of mass spectrometry and ion physics 1983, Vol.49 (1), p.11-24
Main Authors: Klöppel, K.D., Jegers, E., Von Bünau, G.
Format: Article
Language:English
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Summary:Secondary-ions (SI) generated by the bombardment of Fe, Co, Ni, Rh, Pd, Ir and Pt surfaces under oxygen with primary Ar + ions of energy 2 keV at a current density of 0.05 mA cm −2 have been analyzed using a double focusing (Varian 311 A) mass spectrometer. Metal cluster ions Me l + (with l up to 6) and oxide ions Me l O m + (with l up to 6, m up to 5) are detected. The yields of the various ions belonging to a given cluster size l are found to vary as a Gaussian function of the “fragment valence” K=( q+2 m)/ l. SI yields increase with oxygen pressure, reaching plateau or maximum values at pressures of ≈1 mPa. Sudden lowering or raising of the oxygen pressure leads to relaxation of SI yields in times of the order of seconds. The time-dependent as well as the steady-state phenomena follow adsorption kinetic relations.
ISSN:0020-7381
1873-3034
DOI:10.1016/0020-7381(83)85072-4