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The low thermal stress HP-LEC growth of 75 mm diameter In-DOPED GaAs crystals
A study is presented of the effects of various thermal environments in a Melbourn high-pressure liquid encapsulated Czochralski puller on the thermal stress experienced by 75 mm diameter GaAs crystals doped with between 5.4×10 19 to 2.1×10 20cm −3 indium. Approaches investigated for obtaining low th...
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Published in: | Journal of crystal growth 1989, Vol.94 (1), p.75-84 |
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Main Authors: | , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | A study is presented of the effects of various thermal environments in a Melbourn high-pressure liquid encapsulated Czochralski puller on the thermal stress experienced by 75 mm diameter GaAs crystals doped with between 5.4×10
19 to 2.1×10
20cm
−3 indium. Approaches investigated for obtaining low thermal stress growth conditions include the use of thick (up to 6 cm) B
2O
3 encapsulating layers, a graphite “top hat” enclosure, and a controllable crystal after-heater and encapsulant heat shield. Of these, the latter configuration appears to yield the lowest thermal stress growth conditions using a 2 cm thick B
2O
3 encapsulant layer. Growths performed using this configuration have yielded low-dislocation ( |
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ISSN: | 0022-0248 1873-5002 |
DOI: | 10.1016/0022-0248(89)90605-2 |