A new technique for controlling the dopant concentration in the double-crucible method

A new doping procedure for keeping the dopant concentration of the crystal constant in a continuous Czochralski method, using a double-walled crucible, is proposed. In this method the initial concentrations in the inner and the outer crucibles are set to be equal. Therefore, the equalizing phenomena...

Full description

Saved in:
Bibliographic Details
Published in:Journal of crystal growth 1994, Vol.135 (1), p.359-364
Main Authors: Ono, Naoki, kida, Michio, Arai, Yoshiaki, Abe, Keisei, Sahira, Kensho
Format: Article
Language:English
Subjects:
Condensed matter: structure, mechanical and thermal properties
Cross-disciplinary physics: materials science
rheology
Defects and impurities in crystals
microstructure
Doping and impurity implantation in germanium and silicon
Exact sciences and technology
Growth from melts
zone melting and refining
Materials science
Methods of crystal growth
physics of crystal growth
Physics
Structure of solids and liquids
crystallography
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:A new doping procedure for keeping the dopant concentration of the crystal constant in a continuous Czochralski method, using a double-walled crucible, is proposed. In this method the initial concentrations in the inner and the outer crucibles are set to be equal. Therefore, the equalizing phenomena of the concentrations between the two crucibles in the initial stage do not have to be considered. The strategy for doping control in this new method is analyzed using a one-dimensional mathematical model.
ISSN:0022-0248
1873-5002
DOI:10.1016/0022-0248(94)90763-3