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Ultra-high uniformity large-area growth of GaAs/AlGaAs structures by low-pressure MOVPE

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Bibliographic Details
Published in:	Journal of crystal growth 1994-12, Vol.145 (1), p.972-973
Main Authors:	Woelk, E., Ermer, J., Strauch, G., Vijayakumar, P.S., Schmitz, D., Cavicchi, T., Jürgensen, H.
Format:	Article
Language:	English
Subjects:	Condensed matter: structure, mechanical and thermal properties Cross-disciplinary physics: materials science rheology Exact sciences and technology Low-dimensional structures (superlattices, quantum well structures, multilayers): structure, and nonelectronic properties Materials science Methods of deposition of films and coatings film growth and epitaxy Physics Surfaces and interfaces thin films and whiskers (structure and nonelectronic properties) Vapor phase epitaxy growth from vapor phase
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