Hydrogen content and optical properties of LPCVD amorphous silicon films

Optical properties of LPCVD amorphous silicon films deposited both from SiH 4 and from Si 2H 6 are investigated at very low H contents. The optical energy gap varies with deposition temperature even if H concentration is constant. The non-homogeneous H profile seems not influence optical properties,...

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Bibliographic Details
Published in:Journal of non-crystalline solids 1985-12, Vol.77, p.575-578
Main Authors: Manfredotti, C., Scarano, G., Della Mea, G., Rossi Alvarez, C.
Format: Article
Language:English
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Summary:Optical properties of LPCVD amorphous silicon films deposited both from SiH 4 and from Si 2H 6 are investigated at very low H contents. The optical energy gap varies with deposition temperature even if H concentration is constant. The non-homogeneous H profile seems not influence optical properties, which display features quite similar to those of GD samples.
ISSN:0022-3093
1873-4812
DOI:10.1016/0022-3093(85)90726-4