Optical, electrical, mechanical and photoelectronic properties of hard amorphous carbon films

Amorphous carbon films were deposited in RF bias sputtering system and their mechanical, electrical, photoelectronic and optical properties have been investigated. The optical constants of the samples, prepared by RF decomposition of C 6H 6 and CH 4, as well as of evaporated carbon film in VUV were...

Full description

Saved in:
Bibliographic Details
Published in:Journal of non-crystalline solids 1987-12, Vol.97, p.451-454
Main Authors: Pajasová, Libuše, Zemek, Josef, Janča, Jan, Navrátil, Karel
Format: Article
Language:English
Citations: Items that this one cites
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Amorphous carbon films were deposited in RF bias sputtering system and their mechanical, electrical, photoelectronic and optical properties have been investigated. The optical constants of the samples, prepared by RF decomposition of C 6H 6 and CH 4, as well as of evaporated carbon film in VUV were evaluated by means of multiangle reflection method.
ISSN:0022-3093
1873-4812
DOI:10.1016/0022-3093(87)90106-2