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The influence of nitrogen on the optical and electrical properties of sputtered a-Si56Ge44:N:H films
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Published in: | Journal of non-crystalline solids 1991-11, Vol.135 (2-3), p.204-210 |
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Format: | Article |
Language: | English |
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Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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ISSN: | 0022-3093 1873-4812 |
DOI: | 10.1016/0022-3093(91)90421-2 |