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The influence of hydrogen and argon pressure on composition and optoelectronic properties of sputtered a-Si1-xGex:H(x~0.4)

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Bibliographic Details
Published in:	Journal of non-crystalline solids 1993-05, Vol.155 (3), p.195-208
Main Authors:	DRÜSEDAU, T, PANCKOW, A, HERMS, W, SOBOTTA, H, RIEDE, V, BÖTTCHER, R, WITZMANN, A
Format:	Article
Language:	English
Subjects:	Condensed matter: electronic structure, electrical, magnetic, and optical properties Exact sciences and technology Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation Optical properties of specific thin films Physics
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