Physical properties of a-SiOx:H alloys prepared by dc magnetron sputtering with water vapour as oxygen source

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Bibliographic Details
Published in:Journal of non-crystalline solids 1994-03, Vol.169 (1-2), p.29-36
Main Authors: ZACHARIAS, M, DRÜSEDAU, T, PANCKOW, A, FREISTEDT, H, GARKE, B
Format: Article
Language:English
Subjects:
Amorphous semiconductors
glasses
Amorphous semiconductors
glasses
nanocrystalline materials
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Disordered solids
Electrical properties of specific thin films
Electronic structure and electrical properties of surfaces, interfaces, thin films and low-dimensional structures
Exact sciences and technology
Infrared and raman spectra and scattering
Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation
Optical properties of specific thin films
Physics
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ISSN:0022-3093
1873-4812
DOI:10.1016/0022-3093(94)90221-6