(Y-Er)-Ba-Cu-O superconducting thin films obtained ex-situ: toward submicrometric patterning by electron beam lithography

We have grown (Y-Er)BaCuO superconducting thin films on SrTiO 3, with thicknesses ranging from 250 to 7500 A. The superconducting films have been obtained from amorphous precursors deposited by rf magnetron sputtering from a single mosaic target made of (Y-Er), BaF 2. An ex-situ annealing procedure...

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Bibliographic Details
Published in:Journal of the less-common metals 1990-10, Vol.164, p.374-382
Main Authors: Cocciolo, P., Gentili, M., Giovannella, C., Iannuzzi, M., Luciani, L., Merlo, V., Messi, R., Paoluzi, L.
Format: Article
Language:English
Subjects:
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Physics
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Summary:We have grown (Y-Er)BaCuO superconducting thin films on SrTiO 3, with thicknesses ranging from 250 to 7500 A. The superconducting films have been obtained from amorphous precursors deposited by rf magnetron sputtering from a single mosaic target made of (Y-Er), BaF 2. An ex-situ annealing procedure has been used. The critical temperatures depend on their structural connectivity and thickness. The choice of performing the annealing ex-situ made possible to write, by using the electron beam lithography and the lift-off technique, test lines as narrow as 130. nm for the precursor film and useful bridges in the range of one micron for the annealed sample.
ISSN:0022-5088
DOI:10.1016/0022-5088(90)90236-D