High purity metalorganic compounds for III-V MOCVD

A new technique for the purification of group III metalorganics based on low temperature vacuum sublimation is proposed and its advantages are discussed. Various methods for purification of Gp III metalorganics used for the growth of III-V compounds epitaxial films by MOCVD technique are also review...

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Bibliographic Details
Published in:Materials research bulletin 1992-05, Vol.27 (5), p.623-628
Main Authors: Tyagi, R., Purohit, R.K., Agarwal, S.K., Sreedhar, A.K.
Format: Article
Language:English
Subjects:
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials Science
Materials Science, Multidisciplinary
Methods of crystal growth
physics of crystal growth
Physics
Science & Technology
Technology
Theory and models of crystal growth
physics of crystal growth, crystal morphology and orientation
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Summary:A new technique for the purification of group III metalorganics based on low temperature vacuum sublimation is proposed and its advantages are discussed. Various methods for purification of Gp III metalorganics used for the growth of III-V compounds epitaxial films by MOCVD technique are also reviewed briefly.
ISSN:0025-5408
1873-4227
DOI:10.1016/0025-5408(92)90151-O