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A 256 × 256 SRAM-XOR pixel ferroelectric liquid crystal over silicon spatial light modulator

An electronically addressed spatial light modulator is introduced. It is based on the hybrid technology of ferroelectric liquid crystal over silicon, and comprises an array of 256 × 256 pixels operating at a charge balanced frame rate of up to 2.1 kHz. The pixel circuit, incorporating a static rando...

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Bibliographic Details
Published in:Optics communications 1995-09, Vol.119 (5), p.623-632
Main Authors: Burns, D.C., Underwood, I., Gourlay, J., O'Hara, A., Vass, D.G.
Format: Article
Language:English
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Summary:An electronically addressed spatial light modulator is introduced. It is based on the hybrid technology of ferroelectric liquid crystal over silicon, and comprises an array of 256 × 256 pixels operating at a charge balanced frame rate of up to 2.1 kHz. The pixel circuit, incorporating a static random access memory latch and an exclusive-OR gate, has significant performance advantages over the single transistor design used elsewhere. The silicon backplane has also been used to help develop post-processing planarisation techniques for high fill-factor (84%), optically flat electrode mirrors.
ISSN:0030-4018
1873-0310
DOI:10.1016/0030-4018(95)00414-4