Contact-etching of semiconductors

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Bibliographic Details
Published in:Solid-state electronics 1961-01, Vol.2 (2), p.190-190
Main Authors: Rindner, W., Lavine, J.M.
Format: Article
Language:English
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ISSN:0038-1101
1879-2405
DOI:10.1016/0038-1101(61)90035-1