Dissociative chemisorption of NF3 at Si(100) surfaces

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Bibliographic Details
Published in:Surface science 1989-09, Vol.219 (3), p.L560-l564
Main Authors: SHORTER, J. A, LANGAN, J. G, STEINFELD, J. I
Format: Article
Language:English
Subjects:
Chemistry
Exact sciences and technology
General and physical chemistry
Solid-gas interface
Surface physical chemistry
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ISSN:0039-6028
1879-2758
DOI:10.1016/0039-6028(89)90500-1