An assessment of production techniques for the manufacture of thin ferromagnetic films for fast computer store applications

Results are presented of an assessment of several thin film production processes, which could be used to manufacture planar thin ferromagnetic film computer store elements. In particular, electron-beam evaporation and triode sputtering are reviewed in most detail. The degree of control of thickness,...

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Bibliographic Details
Published in:Thin solid films 1969-01, Vol.4 (5), p.333-361
Main Authors: Bosnell, J.R., Voisey, U.C.
Format: Article
Language:English
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Summary:Results are presented of an assessment of several thin film production processes, which could be used to manufacture planar thin ferromagnetic film computer store elements. In particular, electron-beam evaporation and triode sputtering are reviewed in most detail. The degree of control of thickness, rate of deposition, and magnetic parameters together with the uniformity of these parameters, obtainable with these systems, is discussed. The effects of ageing the film elements in a worst case configuration of magnetic field are shown and the activation energies and rate constants associated with the various ageing processes observed are given.
ISSN:0040-6090
1879-2731
DOI:10.1016/0040-6090(69)90099-6