Nucleation of small metal particles on ultrathin SiO2 films on Si

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Bibliographic Details
Published in:Thin solid films 1974-06, Vol.22 (2), p.189-196
Main Authors: Kasprzak, L., Laibowitz, R., Herd, S., Ohring, M.
Format: Article
Language:English
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ISSN:0040-6090
DOI:10.1016/0040-6090(74)90005-4