NiFe films deposited by sputter gun and applications to bubble devices

The sputter gun system has a unique feature which is that the substrate holder is electrically isolated from and physically outside the cathode and anode gun assembly. As a result the substrate surface temperature can be maintained at a lower level than that for the conventional diode sputtering sys...

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Bibliographic Details
Published in:Thin solid films 1976-01, Vol.37 (3), p.423-427
Main Authors: Tao, L.J., Ahn, K.Y., Lin, B.J., Molzen, W.W.
Format: Article
Language:English
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Summary:The sputter gun system has a unique feature which is that the substrate holder is electrically isolated from and physically outside the cathode and anode gun assembly. As a result the substrate surface temperature can be maintained at a lower level than that for the conventional diode sputtering system. This feature is particularly useful for metallization by the lift-off process. NiFe films with excellent physical and magnetic properties have been obtained. The application to overlay patterns for single-level masking bubble devices is presented.
ISSN:0040-6090
1879-2731
DOI:10.1016/0040-6090(76)90610-6