Influence of the preparation conditions on some properties of SiO2 films

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Bibliographic Details
Published in:Thin solid films 1979-04, Vol.58 (2), p.321-324
Main Authors: Vautier, C., Ranc, G., Protin, L.
Format: Article
Language:English
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ISSN:0040-6090
DOI:10.1016/0040-6090(79)90264-5