Different high rate vapour deposition processes for metallurgical coatings

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Bibliographic Details
Published in:Thin solid films 1979-12, Vol.64 (3), p.470-470
Main Authors: Dietrich, W., Stephan, H., Sommerkamp, P., Fischof, J.
Format: Article
Language:English
Online Access:Get full text
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ISSN:0040-6090
1879-2731
DOI:10.1016/0040-6090(79)90333-X