Thermal oxidation and native oxide-substrate reactions on InAs and InxGa1−xAs

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Bibliographic Details
Published in:Thin solid films 1982-08, Vol.94 (3), p.213-222
Main Authors: Schwartz, G.P., Griffiths, J.E., Gualtieri, G.J.
Format: Article
Language:English
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ISSN:0040-6090
DOI:10.1016/0040-6090(82)90298-X