Optical and dielectric properties of thin SiOx films of variable composition

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Bibliographic Details
Published in:Thin solid films 1983-12, Vol.110 (3), p.215-224
Main Authors: SHABALOV, A. L, FELDMAN, M. S
Format: Article
Language:English
Subjects:
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Exact sciences and technology
Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation
Optical properties of specific thin films
Physics
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ISSN:0040-6090
1879-2731
DOI:10.1016/0040-6090(83)90239-0