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From diamond-like carbon to diamond coatings
Carbon films deposited by pyrolytic and plasma-activated deposition from hydrocarbon-containing gases encompass a virtual infinity of compositions (hydrogen concentrations) and structures (from amorphous to single crystal and with variable amounts of sp 1, sp 2 and sp 3 bonding). Coatings which have...
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Published in: | Thin solid films 1987-10, Vol.153 (1), p.1-9 |
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Main Authors: | , , , , , |
Format: | Article |
Language: | English |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | Carbon films deposited by pyrolytic and plasma-activated deposition from hydrocarbon-containing gases encompass a virtual infinity of compositions (hydrogen concentrations) and structures (from amorphous to single crystal and with variable amounts of sp
1, sp
2 and sp
3 bonding). Coatings which have a high degree of sp
3 bonding generally have properties, especially hardness, close to those of single- crystal diamond and are often referred to as diamond-like carbon. Recently, large grain size diamond crystals and continuous diamond coatings have been prepared by plasma chemical vapor deposition methods. Although such materials are different from the diamond-like carbon class of materials, there is clearly a continuum of materials which is expected to lead to vagueness and confusion in nomenclature. In this paper, such issues are dealt with and a working definition of “diamond” coatings is offered. |
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ISSN: | 0040-6090 1879-2731 |
DOI: | 10.1016/0040-6090(87)90164-7 |