Preparation and properties of cubic boron nitride coatings

Cubic boron nitride (CBN) has attracted a great deal of interest in recent years for its unique mechanical and optical properties. Many physical as well as chemical vapor deposition processes have been explored to synthesize CBN coatings. These techniques, however, suffer limitations owing to the re...

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Bibliographic Details
Published in:Thin solid films 1987-10, Vol.153 (1), p.487-496
Main Authors: Lin, P., Deshpandey, C., Doerr, H.J., Bunshah, R.F., Chopra, K.L., Vankar, V.
Format: Article
Language:English
Subjects:
Applications
Applied sciences
Cross-disciplinary physics: materials science
rheology
Engineering techniques in metallurgy. Applications. Other aspects
Exact sciences and technology
Materials science
Metals, semimetals and alloys
Metals. Metallurgy
Others aspects
Physics
Specific materials
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Summary:Cubic boron nitride (CBN) has attracted a great deal of interest in recent years for its unique mechanical and optical properties. Many physical as well as chemical vapor deposition processes have been explored to synthesize CBN coatings. These techniques, however, suffer limitations owing to the requirements of high substrate temperature and/or the necessity of using toxic starting materials. We have developed a new technique where CBN films can be prepared by evaporating boric acid in NH 3 plasma. CBN films have been deposited at substrate temperatures as low as 450°C. Structure and optical and electrical characteristics of the films clearly demonstrate the simple cubic phase in the coatings. These results are presented in this paper.
ISSN:0040-6090
1879-2731
DOI:10.1016/0040-6090(87)90208-2