Chemical vapor deposition of doped TiO2 thin films

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Bibliographic Details
Published in:Thin solid films 1987-03, Vol.147 (2), p.167-176
Main Authors: KURTZ, S. R, GORDON, R. G
Format: Article
Language:English
Subjects:
Applied sciences
Exact sciences and technology
Metals. Metallurgy
Nonmetallic coatings
Production techniques
Surface treatment
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ISSN:0040-6090
1879-2731
DOI:10.1016/0040-6090(87)90282-3