A statistical study of the combined effects of substrate temperature, bias, annealing and a Cr3Si2 undercoating on the tribological properties of r.f. sputtered MoS2 coatings

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Bibliographic Details
Published in:Thin solid films 1987-11, Vol.154 (1-2), p.323-332
Main Authors: Panitz, J.K.G., Pope, L.E., Hills, C.R., Lyons, J.E., Staley, D.J.
Format: Article
Language:English
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ISSN:0040-6090
DOI:10.1016/0040-6090(87)90376-2