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Non-destructive determination of free carrier density of epitaxial layers of GaSb by IR reflectivity measurement
IR reflectivity measurements were made on thin epitaxial GaSb layers grown on n + GaSb and semi-insulating GaAs substrates. The results were interpreted using a two-oscillator dielectric model and free carrier concentrations were determined and compared with electrical measurements.
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Published in: | Thin solid films 1987-12, Vol.155 (1), p.125-132 |
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Main Authors: | , , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | IR reflectivity measurements were made on thin epitaxial GaSb layers grown on n
+ GaSb and semi-insulating GaAs substrates. The results were interpreted using a two-oscillator dielectric model and free carrier concentrations were determined and compared with electrical measurements. |
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ISSN: | 0040-6090 1879-2731 |
DOI: | 10.1016/0040-6090(87)90458-5 |