TiC and TiN coatings formed on Si3N4-TiC composite ceramics by chemical vapour deposition

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Bibliographic Details
Published in:Thin solid films 1988-11, Vol.165 (1), p.149-161
Main Authors: KIM, D. W, PARK, Y. J, LEE, J. G, CHUN, J. S
Format: Article
Language:English
Subjects:
Applied sciences
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials science
Metals, semimetals and alloys
Metals. Metallurgy
Nonmetallic coatings
Physics
Production techniques
Specific materials
Surface treatment
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ISSN:0040-6090
1879-2731
DOI:10.1016/0040-6090(88)90686-4