Growth and characterization of ZnO films deposited on a monolithic Si3N4-SiO2-Si configuration

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Bibliographic Details
Published in:Thin solid films 1989-01, Vol.168 (2), p.291-305
Main Authors: Panwar, B.S., Bhattacharyya, A.B., Nagpal, K.C., Mall, R.P.
Format: Article
Language:English
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ISSN:0040-6090
DOI:10.1016/0040-6090(89)90014-X