Thermal degradation of TiSi2/poly-Si gate electrodes

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Bibliographic Details
Published in:Thin solid films 1989-01, Vol.168 (2), p.325-334
Main Authors: Nygren, S., Östling, M., Petersson, C.S., Norström, H., Rydén, K.H., Buchta, R., Chatfield, C.
Format: Article
Language:English
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ISSN:0040-6090
DOI:10.1016/0040-6090(89)90016-3