Preparation of cubic boron nitride film by CO2 laser physical vapour deposition with simultaneous nitrogen ion supply

Saved in:
Bibliographic Details
Published in:Thin solid films 1990-08, Vol.189 (1), p.125-138
Main Authors: Mineta, S., Kohata, M., Yasunaga, N., Kikuta, Y.
Format: Article
Language:English
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:
ISSN:0040-6090
DOI:10.1016/0040-6090(90)90033-A