Modelling and ellipsometry of the nucleation and growth of zinc sulphide films in ultra high vacuum

The nucleation and growth of zinc sulphide films deposited in an ultrahigh vacuum are observed in terms of differentials of the conventional ellipsometric function ψ and Δ. An effective film model is developed to relate the measured functions to film thickness and refractive index, and, via a simple...

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Bibliographic Details
Published in:Thin solid films 1990-09, Vol.190 (1), p.73-91
Main Authors: Atkinson, R., Lee, K.H., Lissberger, P.H., Manzoor, T.
Format: Article
Language:English
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Summary:The nucleation and growth of zinc sulphide films deposited in an ultrahigh vacuum are observed in terms of differentials of the conventional ellipsometric function ψ and Δ. An effective film model is developed to relate the measured functions to film thickness and refractive index, and, via a simple form of the Volmer-Weber model of nucleation, to microscopic structural parameters. Good agreement is obtained between theoretical predictions and the results of measurements taken over a range of experimental conditions, by the adjustment of only four parameters.
ISSN:0040-6090
1879-2731
DOI:10.1016/0040-6090(90)90131-V